Title:
An infrared thermal detector and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6164819
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared thermal detector and a method of manufacturing the same.SOLUTION: An infrared thermal detector 10 includes a substrate 20, a detector 30, and a thermal leg 50. The detector 30 is spaced apart from the substrate 20 and is configured to absorb incident infrared light via localized surface Plasmon resonance and to change a resistance value according to a temperature change caused by the absorbed infrared light. The thermal leg 50 is configured to transmit a signal from the detector 30 to the substrate 20.
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Inventors:
Park Ha Tin
Holy South Gen
Application
Yuu Yu
Holy South Gen
Application
Yuu Yu
Application Number:
JP2012225216A
Publication Date:
July 19, 2017
Filing Date:
October 10, 2012
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
G01J1/02; G01J5/20; H01L37/00
Domestic Patent References:
JP2011095137A | ||||
JP2004245674A | ||||
JP2006226891A | ||||
JP2000501832A | ||||
JP2009210289A |
Foreign References:
US20060188400 |
Attorney, Agent or Firm:
Hatta International Patent Corporation
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