Title:
A letter electrode for micro plasma of a network, and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6243781
Kind Code:
B2
Inventors:
Masataka Sano
Shigeki
Hideyuki Tsukamoto
Shigeki
Hideyuki Tsukamoto
Application Number:
JP2014070962A
Publication Date:
December 06, 2017
Filing Date:
March 31, 2014
Export Citation:
Assignee:
Seraft Co., Ltd.
International Classes:
B03C3/45; B03C3/47; C22C47/04; C22C49/14; C23C30/00
Domestic Patent References:
| JP6254433A | ||||
| JP2010194439A | ||||
| JP8108092A | ||||
| JP2012200459A |
Foreign References:
| US20060137527 |
Attorney, Agent or Firm:
Patent business corporation Ota patent office