Title:
A manufacturing method of an electrostatic zipper
Document Type and Number:
Japanese Patent JP6283532
Kind Code:
B2
Abstract:
A method of manufacturing an electrostatic chuck includes providing a dielectric substrate having a surface which is constituted by a bottom face, and a plurality of projecting portions protruding from the bottom face, the plurality of projecting portions including top faces to come in contact with the processing target object, and side faces extending from the bottom face to the top faces, respectively; and forming a protective film made of yttrium oxide on the side faces of the plurality of projecting portions and the bottom face such that the top faces are exposed.
Inventors:
Daisuke Hayashi
Application Number:
JP2014035162A
Publication Date:
February 21, 2018
Filing Date:
February 26, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2002334920A | ||||
| JP2008300374A | ||||
| JP2005019700A | ||||
| JP2002503397A | ||||
| JP2000311933A | ||||
| JP11251416A | ||||
| JP10229115A |
Foreign References:
| WO2013111363A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashiwaoka
Yoshiki Kuroki
Junji Kashiwaoka
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