Title:
VAPOR DEPOSITION APPARATUS AND MANUFACTURING METHOD INCLUDING DEPOSITION PROCESS USING VAPOR DEPOSITION APPARATUS
Document Type and Number:
Japanese Patent JP2016204681
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a tray holding tool capable of reducing variations in an amount of vapor deposition on respective surfaces of a work having a three-dimensional shape.SOLUTION: A tray holding tool includes: a fixed part (1100) fixed to a dome of a vapor deposition apparatus; a first internal transmission shaft (1121) which is rotatably supported by the fixed part; a swing part (1200) which is fixed to a swing shaft (1109) rotatably supported by the fixed part and is configured to swing; a second internal transmission shaft (1125) which is coupled to the first internal transmission shaft through a universal joint (1123) and is rotatably supported by the swing part; and a rotation part (1300) which is supported by the second internal transmission shaft and is configured to hold a tray. The tray holding tool is structured such that when the first internal transmission shaft is made to rotate from the outside, the rotation part rotates with the second internal transmission shaft and swings with the swing part.SELECTED DRAWING: Figure 7
Inventors:
HIGUCHI TOSHIRO
UENO HIROSHI
KIMURA HITOSHI
UENO HIROSHI
KIMURA HITOSHI
Application Number:
JP2015084205A
Publication Date:
December 08, 2016
Filing Date:
April 16, 2015
Export Citation:
Assignee:
NALUX CO LTD
International Classes:
C23C14/24; C23C14/50; F16H7/06; F16H21/34
Attorney, Agent or Firm:
Naoya Fushimi