Title:
PRODUCTION OF OPTICAL FILTER, FILM DEPOSITION APPARATUS, AND OPTICAL FILTER
Document Type and Number:
Japanese Patent JP2017226866
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a production of an optical filter capable of enhancing the precision of a film deposition and filming in a homogeneous film thickness distribution by a substrate of a wider area, a film deposition apparatus, and an optical filter produced by said production or deposition apparatus.SOLUTION: In a jig JG for holding a substrate SS or a filming object, a protrusion part TP of the jig JG is protruded to the side of a material target 4 than a filming target face SSa of the substrate SS, in the case where the substrate SS is caused to oppose to the material target 4, and a film formation is made together with the rotation of a rotary support (rotary type support) 3 with respect to the substrate SS while being arranged on the side of the substrate SS with respect to the circumferential direction W1 of the circumference.SELECTED DRAWING: Figure 2
Inventors:
MATSUDA RYOJI
JIDAI HIDETAKA
JIDAI HIDETAKA
Application Number:
JP2016122105A
Publication Date:
December 28, 2017
Filing Date:
June 20, 2016
Export Citation:
Assignee:
KONICA MINOLTA INC
International Classes:
C23C14/50; G02B5/28
Attorney, Agent or Firm:
Mitsuhiro Fukuda