Title:
A manufacturing method of an organic EL thin film formation board
Document Type and Number:
Japanese Patent JP6034228
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a process of manufacturing an organic EL thin film formation substrate that decreases an electro static charge amount of a substrate.SOLUTION: A process of manufacturing an organic EL thin film formation substrate includes: forming an organic EL thin film 39 on a deposition surface 37 of a substrate 31 in a state where a non-deposition surface 38 of the substrate 31 is pasted with a substrate pasting agent 33 to a substrate holding plate 32; making a temperature of the substrate pasting agent 33 to be in one of ranges of either in a low temperature range of 30°C or lower or in a high temperature range of 45°C or over; and applying a peeling force to the substrate 31 to peel the substrate 31.
Inventors:
Mari Fukao
Mitsuru Ueno
Miho Shimizu
Takaomi Kurata
Takanori Muramoto
Mitsuru Ueno
Miho Shimizu
Takaomi Kurata
Takanori Muramoto
Application Number:
JP2013071214A
Publication Date:
November 30, 2016
Filing Date:
March 29, 2013
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H05B33/10; C23C14/50; H01L51/50
Domestic Patent References:
| JP2006274301A | ||||
| JP2012001762A | ||||
| JP2007087807A | ||||
| JP2009140903A | ||||
| JP2010040565A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe
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