PRESSURE SENSOR, AND MANUFACTURING METHOD OF PRESSURE SENSOR

Japanese Patent JP2017078622

A

PROBLEM TO BE SOLVED: To suppress variations of preload to a piezoelectric element to reduce variations in electric charge outputted from the piezoelectric element.SOLUTION: A pressure sensor comprises: a cylindrical housing having a bottom extending along an axis line and extending radially inward at a rear end side of the axis line; a piezoelectric unit arranged in the housing and including a piezoelectric element; a diaphragm fixed to the housing at a side closer to a tip than the piezoelectric unit, and deforming according to a pressure received; a transmission member fixed to the diaphragm and having a read end in contact with the tip of the piezoelectric unit; a bearing member fixed to the housing and having a tip in contact with the rear end of the piezoelectric unit; and an elastic member deforming in a greater amount with respect to force in the axis line direction than the transmission member and the bearing member. The elastic member is arranged in one of a first position which is between the piezoelectric unit and a bottom of the housing, and is radially outward of the bearing member and a second position which is between the piezoelectric unit and the diaphragm, and is radially outward of the transmission member.SELECTED DRAWING: Figure 2

IWABUCHI JUNKI
YAMADA TATSUNORI

JP2015206238A

April 27, 2017

October 20, 2015

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NGK SPARK PLUG CO

G01L23/10; G01L9/08

JP2014048181A	2014-03-17
JPH07113713A	1995-05-02
JPH06207875A	1994-07-26
JPS60123647U	1985-08-20

US20140216145A1	2014-08-07
WO2007043068A1	2007-04-19

Fenghwa International Patent Office

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