Title:
A manufacturing method of a resist composition and a resist pattern
Document Type and Number:
Japanese Patent JP6134563
Kind Code:
B2
Inventors:
Koji Ichikawa
Takayuki Miyagawa
Takashi Hiraoka
Takayuki Miyagawa
Takashi Hiraoka
Application Number:
JP2013082904A
Publication Date:
May 24, 2017
Filing Date:
April 11, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; C08F20/28; G03F7/004; G03F7/038
Domestic Patent References:
| JP2012041274A | ||||
| JP2011219363A | ||||
| JP2012013807A | ||||
| JP2011148766A | ||||
| JP2009209128A | ||||
| JP2003327631A |
Foreign References:
| US20110318688 | ||||
| WO2013058250A1 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
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