Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
A method for manufacturing a lower layer coating constituent and a detailed electronic devide
Document Type and Number:
Japanese Patent JP6109750
Kind Code:
B2
Abstract:
The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV.

More Like This:
JPH1097057ORIGINAL PLATE OF WATERLESS PLANOGRAPHIC PRINTING PLATE
JP4318453Diffuse reflection prevention film composition and method for forming a photoresist pattern using the same
JP4545524Laminated body and resist pattern forming method
Inventors:
Yao Falon
Bogstin The Cherry
Lin Gan Yang
Nicel Mark O
Application Number:
JP2013553041A
Publication Date:
April 05, 2017
Filing Date:
February 07, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Merck Patent Gesellschaft mit beschraenkter Haftung
International Classes:
G03F7/11; C08G14/06; H01L21/027
Domestic Patent References:
JP2011527461A
JP2008513567A
JP2005321752A
Foreign References:
WO2007036982A1
US20080286689
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Katsunori Uenishi
Ichiro Torayama



 
Previous Patent: Guide wire

Next Patent: ANTI-LOCK BRAKE SYSTEM