Title:
MICROPUMP, MICROCHIP AND MICRO DEVICE
Document Type and Number:
Japanese Patent JP2017008722
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a micropump, a microchip, and a micro device which can stabilize a pump discharge volume and can perform pumping action with smaller power.SOLUTION: A micropump includes: a pump chamber 3 for sucking and discharging a fluid 11; an elastic film 2 stretched by tensile force in such a manner of covering the pump chamber from an upper part; a sphere 1 for pressing the elastic film from the upper side; a sphere stay 1a for supporting the sphere; an actuator 5 for imparting vertical motion to the sphere; and a control section 6 for controlling the vertical motion of the actuator. The pump chamber is defined by a curved bottom surface 3a and a side surface 3b, and the curved bottom surface of the pump chamber has the same radius of curvature as that of a spherical surface of the sphere, and the side surface of the pump chamber is plane, and a change point of the curved bottom surface and the plane surface exists in a prescribed range in a vertical cross-sectional shape of the pump chamber.SELECTED DRAWING: Figure 1A
Inventors:
HISHIDA MITSUKI
Application Number:
JP2015121280A
Publication Date:
January 12, 2017
Filing Date:
June 16, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
F04B43/02; B01J19/00; G01N37/00
Attorney, Agent or Firm:
Mitsuo Tanaka
Samejima Mutsumi
Hiroshi Okabe
Mitsuo Wada
Samejima Mutsumi
Hiroshi Okabe
Mitsuo Wada