Title:
アミジン誘導体をリガンドとする新規ゲルマニウム化合物及びその製造方法
Document Type and Number:
Japanese Patent JP5524979
Kind Code:
B2
Abstract:
Provided is a germanium complex represented by Chemical Formula 1 wherein Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (Ci-C7) alkyl. The provided germanium complex with an amidine derivative ligand is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
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Inventors:
Jun Jason
Yun Soo Hyun
Kim Min Chan
Han Sung Won
Park Youngju
Shin Joon
Sunkiwan
Issan Kyun
Yun Soo Hyun
Kim Min Chan
Han Sung Won
Park Youngju
Shin Joon
Sunkiwan
Issan Kyun
Application Number:
JP2011545294A
Publication Date:
June 18, 2014
Filing Date:
January 07, 2010
Export Citation:
Assignee:
SOULBRAIN SIGMA-ALDRICH LTD.
International Classes:
C23C16/18; C07F7/30
Domestic Patent References:
| JP2007169785A | ||||
| JP2008103731A | ||||
| JP2008131046A | ||||
| JP7285970A |
Foreign References:
| WO2008057616A1 | ||||
| WO2007015436A1 | ||||
| WO2006012052A1 | ||||
| WO2007133837A1 | ||||
| US20080020564 |
Other References:
Journal of the American Chemical Society,1997年,Vol.119, No.43,p.10359-10363
Polyhedron,2002年,Vol.21,p.619-627
Polyhedron,2002年,Vol.21,p.619-627
Attorney, Agent or Firm:
Masaki Hirota
Seiji Ozawa
Yusaku Tokai
Makoto Horiuchi
Seiji Ozawa
Yusaku Tokai
Makoto Horiuchi
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