Vibrating elements, oscillators, vibrating devices, electronic devices and mobiles

Title:

Vibrating elements, oscillators, vibrating devices, electronic devices and mobiles

Document Type and Number:

Japanese Patent JP6318590

Kind Code:

B2

Abstract:

A vibration element includes a vibrating portion, a support portion that supports the vibrating portion, and a suspension arm that couples the vibrating portion to the support portion. In addition, the suspension arm includes a meandering portion extending out the support portion and an inclination portion that couples the meandering portion to the vibrating portion.

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Inventors:

Seiichiro Ogura
Keiichi Yamaguchi
Ryuta Nishizawa
Takayuki Kikuchi

Application Number:

JP2013251780A

Publication Date:

May 09, 2018

Filing Date:

December 05, 2013

Export Citation:

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Assignee:

Seiko Epson Corporation

International Classes:

G01C19/5607; G01C19/5628; H01L41/047; H01L41/113

Domestic Patent References:

JP2011017581A
JP2006201011A
JP2013181856A

Foreign References:

US5585561

Attorney, Agent or Firm:

Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai

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