Title:
圧電体膜、圧電素子、およびインクジェットヘッド
Document Type and Number:
Japanese Patent JP6451025
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric film having superior characteristic controllability, a piezoelectric element using the film, and an ink jet head using the element.SOLUTION: A piezoelectric film is formed on a lower electrode 22 as a ground layer. A seed layer 72 is formed in a seed formation region 81 set locally on the lower electrode 22. Over the sheet formation region 81 where the seed layer 72 is formed and a seed non-formation region 82 where the seed layer 72 is not formed, the piezoelectric film is formed in contact with the seed layer 72 in the seed formation region 81 and the ground layer (the lower electrode 22) in the seed non-formation region 82. The seed formation region 81 and the seed non-formation region 82 may be formed in stripes. Further, the seed formation region 81 and the seed non-formation region 82 may be respectively annularly such that one is arranged inside or outside the other.SELECTED DRAWING: Figure 9
Inventors:
Takaya Nagahata
Application Number:
JP2014179164A
Publication Date:
January 16, 2019
Filing Date:
September 03, 2014
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L41/319; B41J2/14; H01L37/02; H01L41/09; H01L41/113; H01L41/311
Domestic Patent References:
| JP2011201264A | ||||
| JP2008227146A | ||||
| JP2009234022A | ||||
| JP2015027789A | ||||
| JP2005354026A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Kyoumura Junji
Mio Kawasaki
Kyoumura Junji
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