Title:
A piezo-electric film sensor
Document Type and Number:
Japanese Patent JP6226079
Kind Code:
B2
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Inventors:
Hideki Kawamura
Application Number:
JP2016543877A
Publication Date:
November 08, 2017
Filing Date:
July 24, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01L1/16
Domestic Patent References:
| JP2014074618A | ||||
| JP2007286064A | ||||
| JP2001159569A | ||||
| JP52099869A | ||||
| JP2005261464A | ||||
| JP10332509A | ||||
| JP9236504A |
Foreign References:
| WO2013111841A1 | ||||
| US20140002058 |
Attorney, Agent or Firm:
Kaede International Patent Office
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