Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC MODULE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP2017085425
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element having a piezoelectric of high piezoelectric characteristics, and to provide a piezoelectric module, an electronic apparatus, and a method of manufacturing a piezoelectric element.SOLUTION: A receiving transducer 52 includes a flexible portion 412D, a piezoelectric film 423 provided on the flexible portion 412D, a first electrode 422 provided between the first face 412B1 of the flexible portion 412D where the piezoelectric film 423 is provided, and the second face 423A of the piezoelectric film 423 on the side opposite to the flexible portion 412D, and a second electrode 424 provided between the first face 412B1 and second face 423A, and facing the first electrode 422 via a gap, in a plan view from the thickness direction of the flexible portion 412D.SELECTED DRAWING: Figure 8
Inventors:
MIYAZAWA HIROSHI
ITO HIROSHI
NAKAMURA YUSUKE
YAMADA MASAYOSHI
YAMAZAKI SEIKA
FUNASAKA TSUKASA
ITO HIROSHI
NAKAMURA YUSUKE
YAMADA MASAYOSHI
YAMAZAKI SEIKA
FUNASAKA TSUKASA
Application Number:
JP2015213454A
Publication Date:
May 18, 2017
Filing Date:
October 29, 2015
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H04R17/00; H01L41/047; H01L41/09; H01L41/113; H01L41/187; H01L41/257; H01L41/319; H04R31/00
Domestic Patent References:
| JP2008227146A | 2008-09-25 | |||
| JP2009071318A | 2009-04-02 | |||
| JPS63307326A | 1988-12-15 |
Attorney, Agent or Firm:
Intellectual Property Office
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