Title:
A plasma treatment apparatus and a plasma processing method
Document Type and Number:
Japanese Patent JP6146807
Kind Code:
B2
Inventors:
Toshiyuki Kawasaki
Application Number:
JP2013114167A
Publication Date:
June 14, 2017
Filing Date:
May 30, 2013
Export Citation:
Assignee:
Bunri Gakuen
International Classes:
H05H1/30; B01J19/08
Domestic Patent References:
| JP9232293A | ||||
| JP2010067839A | ||||
| JP2002151543A | ||||
| JP2009170237A | ||||
| JP7508855A | ||||
| JP9302118A | ||||
| JP2009166017A | ||||
| JP2006073722A |
Foreign References:
| WO2012060325A1 |
Attorney, Agent or Firm:
Kenichiro Matsuo
Yasuo Ichikawa
Yasuo Ichikawa
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