Title:
A pod and a load port device with which a purge system and the purge system are presented
Document Type and Number:
Japanese Patent JP6226190
Kind Code:
B2
Abstract:
A system prevents oxidative gases in a FOUP which is fixed to an FIMS system in an open state from increasing over time. A tower type gas supply port extending from the bottom of the FOUP to inside is provided. Nitrogen can be supplied into the FOUP through the gas supply port in addition to nitrogen purge through the pod opening, when the pod is mounted on the FIMS. Two gas flows thus formed cooperate to create a gas flow flowing along the side of the FOUP opposite to the opening and to the opening. Thus, the gas in the interior of the FOUP is remounted with nitrogen uniformly.
More Like This:
Inventors:
Iwamoto Tadamasa
Application Number:
JP2014030354A
Publication Date:
November 08, 2017
Filing Date:
February 20, 2014
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01L21/677; H01L21/673
Domestic Patent References:
| JP2012019046A | ||||
| JP2006351868A | ||||
| JP2011258624A | ||||
| JP2012114133A | ||||
| JP2013058734A |
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Koji Yoshizawa
Masami Saito
Shinichi Usui
Takao Ochi
Koji Yoshizawa
Masami Saito
Previous Patent: A bead conveying machine with Stiffener
Next Patent: METHOD AND DEVICE FOR COATING BLADE COATER
Next Patent: METHOD AND DEVICE FOR COATING BLADE COATER