Title:
POSITION CALCULATION METHOD, SHAPE MEASUREMENT METHOD, SHAPE MEASUREMENT APPARATUS, PROGRAM, RECORDING MEDIUM, AND METHOD OF MANUFACTURING COMPONENT
Document Type and Number:
Japanese Patent JP2017072447
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To acquire an actual position of a rotary shaft of a rotary stage tilting a detected surface with a simple work and to shorten the time needed to acquire the actual position of the rotary stage.SOLUTION: A CPU calculates wavefront sensitivity as a variation quantity of a wavefront of reflected light through simulation based upon a design shape of a primary standard having a reference plane (S102). The CPU calculates a first wavefront of reflected light from the primary standard through actual measurement (S104). The CPU calculates a first position of a vertex of the reference plane using the wavefront sensitivity and first wavefront (S105). The CPU rotates a θrotary stage (S106). The CPU calculates a second wavefront of the reflected light from the primary standard through actual measurement (S107). The CPU calculates a second position of the vertex of the reference plane using the wavefront sensitivity and second wavefront (S108). The CPU calculates an actual position of a rotary shaft of the θrotary stage from the first position and second position of the vertex of the reference plane and an angle variation quantity of a tilt angle of the primary standard obtained at S106 (S109).SELECTED DRAWING: Figure 4
Inventors:
ENOMOTO AKINORI
IIJIMA HITOSHI
MAEDA ATSUSHI
IIJIMA HITOSHI
MAEDA ATSUSHI
Application Number:
JP2015198659A
Publication Date:
April 13, 2017
Filing Date:
October 06, 2015
Export Citation:
Assignee:
CANON KK
International Classes:
G01B11/00; G01B11/24; G01B11/26
Attorney, Agent or Firm:
Kazuo Chikajima
Takashi Daejeon
Takashi Daejeon