Title:
A posture detecting method, Die bonder , and a bonding method of the axis of rotation of a bonding head
Document Type and Number:
Japanese Patent JP6276553
Kind Code:
B2
Inventors:
Kunihiro Tsuchiya
Shingo Fukasawa
Koji Hosaka
Keita Yamamoto
Shingo Fukasawa
Koji Hosaka
Keita Yamamoto
Application Number:
JP2013209329A
Publication Date:
February 07, 2018
Filing Date:
October 04, 2013
Export Citation:
Assignee:
Fasford Technology Co., Ltd.
International Classes:
H01L21/52
Domestic Patent References:
| JP201365627A | ||||
| JP11186796A | ||||
| JP2012248728A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation