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Title:
PREPARATION METHOD OF SILANIZATION AGENT CHEMICAL LIQUID AND SURFACE TREATMENT METHOD
Document Type and Number:
Japanese Patent JP2016180055
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a preparation method of a silanization agent chemical liquid for reducing concentration of metal impurities of the silanization agent chemical liquid which cannot be distillation purified because there may be one easily to be modified by heating or one having hydrolyzability, and a surface treatment method using the silanization agent chemical liquid.SOLUTION: There is provided a preparation method of a silanization agent chemical liquid including a process of reducing metal impurities in silanization agent chemical liquid before treatment by using an ion exchange resin membrane contacted with an organic solvent in advance. There is provided the preparation method of a silanization agent chemical liquid, where metal impurities contain at least one selected from Fe, Cu, Al and Zn, the organic solvent is alkylene glycol alkyl ether acetate, especially propylene glycol monomethyl ether acetate (PEGMEA). There is provided a surface treatment method for exposing the silanization agent chemical liquid to a substrate surface and hydrophobizing the substrate surface.SELECTED DRAWING: None

Inventors:
ISHIKAWA KIYOSHI
KUMAZAWA AKIRA
MORI DAIJIRO
Application Number:
JP2015060985A
Publication Date:
October 13, 2016
Filing Date:
March 24, 2015
Export Citation:
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Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
C09K3/18; H01L21/304
Domestic Patent References:
JP2013138178A2013-07-11
JPH10192663A1998-07-28
JPH0753763A1995-02-28
JP2014065300A2014-04-17
Attorney, Agent or Firm:
Masayuki Masabayashi



 
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