Title:
ナノスケールフィーチャを備えたテンプレートが形成されている構造体およびその作製方法
Document Type and Number:
Japanese Patent JP4674366
Kind Code:
B2
Abstract:
A structure 100 is provided that is formed with a template 500 defining a pattern having nanoscale features. The template 500 may be positioned on a substrate 420 and include a resist layer 230 having openings formed therein, where the template 500 is configured to accommodate the controlled assembly of nanoscale objects 910.
Inventors:
James W. Staciac
Kevin Francis Peters
Paybell Cornilovich
Kevin Francis Peters
Paybell Cornilovich
Application Number:
JP2008132877A
Publication Date:
April 20, 2011
Filing Date:
May 21, 2008
Export Citation:
Assignee:
Samsung Electronics Company Limited
International Classes:
B29C59/02; B81C99/00; B81B7/00; B82B1/00; B82B3/00; C12Q1/68; G03F7/00; H01L21/027; H01L21/768
Domestic Patent References:
| JP2004363584A | ||||
| JP11011917A | ||||
| JP2001057146A | ||||
| JP2001189014A | ||||
| JP2000190300A | ||||
| JP9082939A | ||||
| JP2003149401A | ||||
| JP2001167692A | ||||
| JP2003183849A | ||||
| JP2003002800A |
Foreign References:
| US20030054342 | ||||
| US20030032046 | ||||
| US5948621 | ||||
| US20020119251 | ||||
| US5776748 | ||||
| WO2004092836A1 | ||||
| US20050118338 | ||||
| WO2002005299A1 | ||||
| WO2004004927A1 |
Other References:
Microelectronic Engineering,1997年,35,p.237-240
Microelectronic Engineering,2002年,61-62,p.393-398
Microelectronic Engineering,2002年,61-62,p.423-428
Microelectronic Engineering,2003年,65,p.163-170
Microelectronic Engineering,2002年,61-62,p.393-398
Microelectronic Engineering,2002年,61-62,p.423-428
Microelectronic Engineering,2003年,65,p.163-170
Attorney, Agent or Firm:
Makoto Hagiwara