Title:
A substrate angle degree unites and they are a device and the method of a substrate angle degree puts together.
Document Type and Number:
Japanese Patent JP6088241
Kind Code:
B2
Inventors:
Hirohiko Goto
Application Number:
JP2012280010A
Publication Date:
March 01, 2017
Filing Date:
December 21, 2012
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
H01L21/68; H01L21/677
Domestic Patent References:
| JP2002100664A | ||||
| JP2008300609A | ||||
| JP2011091276A | ||||
| JP2000077501A |
Attorney, Agent or Firm:
Patent business corporation Yuko patent office
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