Title:
Suspension membrane for capacitive pressure sensor
Document Type and Number:
Japanese Patent JP6298216
Kind Code:
B2
Abstract:
Embodiments of a method for forming a suspended membrane include depositing a first electrically conductive material above a sacrificial layer and within a boundary trench. The first electrically conductive material forms a corner transition portion above the boundary trench. The method further includes removing a portion of the first electrically conductive material that removes at least a portion of uneven topography of the first electrically conductive material. The method further includes depositing a second electrically conductive material. The second electrically conductive material extends beyond the boundary trench. The method further includes removing the sacrificial layer through etch openings and forming a cavity below the second electrically conductive material. The first electrically conductive material defines a portion of a sidewall boundary of the cavity.
Inventors:
Besling, Willem Frederik Adrinus
Pienenburg, Remco Henryx Wilhelms
Van der Afault, Casper
Oldsen, Marten.
Martin Gossence
Pienenburg, Remco Henryx Wilhelms
Van der Afault, Casper
Oldsen, Marten.
Martin Gossence
Application Number:
JP2017505562A
Publication Date:
March 20, 2018
Filing Date:
July 24, 2015
Export Citation:
Assignee:
AMS International AG
International Classes:
G01L9/00; B81B3/00; B81C1/00; H01L29/84
Domestic Patent References:
| JP5792106B2 | ||||
| JP5832417B2 | ||||
| JP5933480B2 | ||||
| JP6119615B2 | ||||
| JP4138036B2 | ||||
| JP4724488B2 | ||||
| JP4988217B2 | ||||
| JP5914010B2 | ||||
| JP2009147311A | ||||
| JP3268554B2 |
Foreign References:
| EP2674392A1 | ||||
| US6887391 |
Attorney, Agent or Firm:
Shinei Patent Office