Title:
Tetrachlorosilane recovery method and polycrystalline silicon production method
Document Type and Number:
Japanese Patent JP6287081
Kind Code:
B2
Inventors:
Ikukawa Mitsutoshi
Application Number:
JP2013230037A
Publication Date:
March 07, 2018
Filing Date:
November 06, 2013
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C01B33/107; C01B33/035
Domestic Patent References:
| JP2007001791A | ||||
| JP2013067520A | ||||
| JP11049508A |
Attorney, Agent or Firm:
Masakazu Aoyama