Title:
リソグラフィ用途のための熱硬化性アンダーコート
Document Type and Number:
Japanese Patent JP2007529037
Kind Code:
A
Abstract:
Thermally curable undercoat composition comprising for producing a bilayer relief image comprising: a) a polymer of Structure I comprising repeating units of Structure II, III, and IV b) a phenolic crosslinker; c) a thermal acid generator (TAG); and d) a solvent.
Inventors:
Be Devinodo
Sanjay Malik
Thomas Jay Caucab
Thomas Salubi
Sanjay Malik
Thomas Jay Caucab
Thomas Salubi
Application Number:
JP2007502930A
Publication Date:
October 18, 2007
Filing Date:
March 09, 2005
Export Citation:
Assignee:
FujiFilm Electronic Materials USA, Inc.
International Classes:
G03F7/11; C08F212/08; C08F220/10; G03C1/492; G03F7/09; H01L21/027
Domestic Patent References:
| JP2002311594A | 2002-10-23 | |||
| JP2003114533A | 2003-04-18 |
Attorney, Agent or Firm:
Chika Takagi
Junji Yuda
Shoji Miwa
Junji Yuda
Shoji Miwa