Title:
A wave face measuring device and an optical system assembling apparatus
Document Type and Number:
Japanese Patent JP6125131
Kind Code:
B1
Abstract:
被検光学系（３）を照明し、複数の波面計測視野の光束を被検光学系３から出射させる光源系（２６）と、被検光学系（３）から出射される複数の波面計測視野の光束を計測し、波面収差を算出する１つの波面センサ（２８）と、被検光学系（３）から出射される複数の波面計測視野の光束を、波面センサ（２８）に選択的に入射させる光路光学系（３１）とを備える。
Inventors:
Hitoshi Ono
Jiro Suzuki
Yoshifumi Miwa
Toshiyuki Ando
Jiro Suzuki
Yoshifumi Miwa
Toshiyuki Ando
Application Number:
JP2017502726A
Publication Date:
May 10, 2017
Filing Date:
August 22, 2016
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01J9/00; G01M11/02
Domestic Patent References:
| JP2010185803A | 2010-08-26 | |||
| JP2006032692A | 2006-02-02 |
Foreign References:
| US20120074294A1 | 2012-03-29 | |||
| WO2007120112A1 | 2007-10-25 |
Attorney, Agent or Firm:
Hideaki Tazawa
Hamada Hatsune
Nakashima Shigeru
Tatsuya Sakamoto
Tsujioka Masaaki
Kazuma Inoue
Hamada Hatsune
Nakashima Shigeru
Tatsuya Sakamoto
Tsujioka Masaaki
Kazuma Inoue
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