Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/1995/027215
Kind Code:
A1
Abstract:
A low-cost, high-performance acceleration sensor for an air bag system of automobiles. Fixed electrodes opposing a movable electrode are disposed on a substrate on only one side of the movable electrode, and the movable electrode has the same thickness as a beam.
Inventors:
SUZUKI SEIKO (JP)
MIKI MASAYUKI (JP)
MATSUMOTO MASAHIRO (JP)
SUZUKI MASAYOSHI (JP)
ICHIKAWA NORIO (JP)
MIKI MASAYUKI (JP)
MATSUMOTO MASAHIRO (JP)
SUZUKI MASAYOSHI (JP)
ICHIKAWA NORIO (JP)
Application Number:
PCT/JP1995/000547
Publication Date:
October 12, 1995
Filing Date:
March 24, 1995
Export Citation:
Assignee:
HITACHI LTD (JP)
HITACHI AUTOMOTIVE ENG (JP)
SUZUKI SEIKO (JP)
MIKI MASAYUKI (JP)
MATSUMOTO MASAHIRO (JP)
SUZUKI MASAYOSHI (JP)
ICHIKAWA NORIO (JP)
HITACHI AUTOMOTIVE ENG (JP)
SUZUKI SEIKO (JP)
MIKI MASAYUKI (JP)
MATSUMOTO MASAHIRO (JP)
SUZUKI MASAYOSHI (JP)
ICHIKAWA NORIO (JP)
International Classes:
G01P1/02; G01P15/125; (IPC1-7): G01P15/125
Foreign References:
| JPH04301575A | 1992-10-26 | |||
| JPH06289049A | 1994-10-18 | |||
| JPH06249875A | 1994-09-09 | |||
| JPH04116465A | 1992-04-16 | |||
| JPH05281254A | 1993-10-29 |
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