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Title:
PROCESS FOR PRODUCING A MICROMECHANICAL SENSOR UNIT FOR DETECTING ACCELERATION
Document Type and Number:
WIPO Patent Application WO/1995/027214
Kind Code:
A1
Abstract:
A micromechanical sensor unit for detecting acceleration having a pendulum with a spiral spring (B) fitted on a substrate (CH) via a support (E) and oscillating parallel to the substrate surface, and having at least one electrically conductive stop arranged on the substrate (CH) beside the pendulum as a position sensor (S), is produced in the following steps: the substrate is coated in succession with a soluble intermediate layer (P1), an electrically conductive layer (P2) and a photo-resist layer (P3). Photo-lithographic negative forms of the pendulum (Gm1), the stop (Gm2) and the support (Gm3) are made in the photo-resist layer (P3) by dissolving photo-resist material out as far as the electrically conductive layer (P2) and then filled with metal. Finally the intermediate layer (P1) beneath the pendulum and further photo-resist material immediately beside the pendulum and the stop are dissolved away.

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JP3175557BIDIRECTIONAL OPERATION TYPE IMPACT SENSOR
JPH10293072IMPACT FORCE MEASURING APPARATUS
Inventors:
MADER GERHARD (DE)
NOETZEL JENS (DE)
SCHULZE STEFFEN (DE)
Application Number:
PCT/DE1995/000430
Publication Date:
October 12, 1995
Filing Date:
March 30, 1995
Export Citation:
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Assignee:
SIEMENS AG (DE)
MADER GERHARD (DE)
NOETZEL JENS (DE)
SCHULZE STEFFEN (DE)
International Classes:
G01P15/00; G01P15/08; G01P15/135; G01P21/00; (IPC1-7): G01P15/08
Domestic Patent References:
WO1989001632A11989-02-23
Foreign References:
US4855544A1989-08-08
US5025346A1991-06-18
EP0582797A11994-02-16
EP0306178A21989-03-08
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