Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/024449
Kind Code:
A1
Abstract:
Disclosed is an acceleration sensor which has improved impact resistance by suppressing maximum stress without reducing the sensitivity of the sensor and without concentrating stress to the intersection corners. The acceleration sensor (100) is provided with: a frame section (111); a weight section (112); a beam section (113) which connects together the frame section (111) and the weight section (112); an acceleration detecting section formed on the beam section (113); a fillet section (116) which expands toward the connecting section between the beam section (113) and the weight section (112) or the frame section (111); and a stress relaxing section (117), which is formed in an arc shape or an ellipsoidal shape on the lower side of the connecting section (115), and has a depth toward the further side from the connecting section (115). The stress relaxing section (117) is formed so as to satisfy the following inequalities: L≥100 μm, 30 μm≤W≤60 μm, and 10 μm≤O≤40 μm, where (W) is the beam width, (L) is the width of the intersecting portion, and (O) is the depth.
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Inventors:
MATSUMOTO TAKASHI
TESHIMA YASUHIRO
TESHIMA YASUHIRO
Application Number:
PCT/JP2010/005235
Publication Date:
March 03, 2011
Filing Date:
August 25, 2010
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD (JP)
MATSUMOTO TAKASHI
TESHIMA YASUHIRO
MATSUMOTO TAKASHI
TESHIMA YASUHIRO
International Classes:
G01P15/18; G01P15/12; H01L29/84
Domestic Patent References:
| WO2005062060A1 | 2005-07-07 |
Foreign References:
| JP2008224525A | 2008-09-25 | |||
| JP2008224254A | 2008-09-25 | |||
| JP2009133807A | 2009-06-18 | |||
| JP2004198280A | 2004-07-15 |
Attorney, Agent or Firm:
WASHIDA, KIMIHITO (JP)
Koichi Washida (JP)
Koichi Washida (JP)
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