ACOUSTIC RESONATOR ASSEMBLY AND FILTER - HANGZHOU XINGHE TECH CO LTD

Title:

ACOUSTIC RESONATOR ASSEMBLY AND FILTER

Document Type and Number:

WIPO Patent Application WO/2022/056943

Kind Code:

A1

Abstract:

Disclosed in the present invention are an acoustic resonator assembly and a filter. The acoustic resonator assembly comprises at least two acoustic resonators that are vertically connected to each other. The acoustic resonator comprises: an acoustic mirror, a bottom electrode layer, a piezoelectric layer, and a top electrode layer that are provided on a substrate, respectively. An active area of the acoustic resonator is defined by an overlapping portion of the acoustic mirror, the bottom electrode layer, the piezoelectric layer, and the top electrode layer. The acoustic resonator further comprises a support layer provided on the substrate or the piezoelectric layer on the periphery of a projection area of the acoustic mirror on the substrate. The at least two acoustic resonators that are perpendicularly connected to each other are connected by means of the support layer. The filter processed in the present invention significantly reduces the volume of a device by 65% and the area of the device by 40%, improves design freedom and reduces design difficulty, optimizes process and improves process compatibility, enhances product performance, and greatly reduces costs.

Inventors:

LI LINPING (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)

Application Number:

PCT/CN2020/116909

Publication Date:

March 24, 2022

Filing Date:

September 22, 2020

Export Citation:

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Assignee:

HANGZHOU XINGHE TECH CO LTD (CN)

International Classes:

H03H9/25

Foreign References:

US20170353173A1	2017-12-07
US20140139077A1	2014-05-22
CN103490743A	2014-01-01
US20020109564A1	2002-08-15

Other References: