Title:
ACTIVE LAYER, THIN FILM TRANSISTOR, ARRAY SUBSTRATE, AND DISPLAY APPARATUS AND FABRICATION METHODS
Document Type and Number:
WIPO Patent Application WO/2017/121243
Kind Code:
A1
Abstract:
An active layer, a thin film transistor, an array substrate, and a display apparatus, and fabrication methods thereof are provided. A method for fabricating an active layer (4) in a thin film transistor is provided by forming a thin film by a direct current (DC) sputtering process; and etching the thin film to form the active layer (4). The thin film is made of a material selected to provide the active layer (4) with a carrier concentration of at least approximately 1x10 17cm -3 and a carrier mobility of at least approximately 20 cm 2/Vs.
Inventors:
YAN LIANGCHEN (CN)
YUAN GUANGCAI (CN)
XU XIAOGUANG (CN)
WANG LEI (CN)
PENG JUNBIAO (CN)
LAN LINFENG (CN)
YUAN GUANGCAI (CN)
XU XIAOGUANG (CN)
WANG LEI (CN)
PENG JUNBIAO (CN)
LAN LINFENG (CN)
Application Number:
PCT/CN2016/112952
Publication Date:
July 20, 2017
Filing Date:
December 29, 2016
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
UNIV SOUTH CHINA TECH (CN)
UNIV SOUTH CHINA TECH (CN)
International Classes:
H01L29/786; H01L29/24
Foreign References:
| CN104952914A | 2015-09-30 | |||
| CN105655389A | 2016-06-08 | |||
| CN105161423A | 2015-12-16 | |||
| US20110101459A1 | 2011-05-05 |
Other References:
See also references of EP 3403281A4
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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