Title:
ACTUATOR AND ADHESIVE CHUCK DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/102913
Kind Code:
A1
Abstract:
The purpose of the present invention is to drive a rotor in a contactless state without core deviation. A plurality of metal bellows (11, 11') having accordion-shaped sections (11a, 11a') are disposed concentrically one inside the other an expansion/contraction section (10), the inner peripheral ends (11b, 11b') and the outer peripheral ends (11c, 11c') of the accordion-shaped sections (11a, 11a') of the metal bellows (11, 11') are fixed by the expansion/contraction deformation of the metal bellows (11, 11'). The entirety of the expansion/contraction section (10) does not deform at all in the X,Y or θ direction other than the direction of expansion/contraction deformation (the Z direction), and thus a rotor (40) disposed across one end of the metal bellows (11, 11') with a rising/falling section (20) interposed therebetween can move reciprocally, without core deviation, in the X, Y and θ directions other than the direction of expansion/contraction deformation (the Z direction) within the central space (12) of the expansion/contraction section (10) and a through-hole (31) in a base section (30).
Inventors:
OHTANI YOSHIKAZU (JP)
SATO KENJI (JP)
MINAMOTO HIROSHI (JP)
AOKI KAZUNARI (JP)
NOBUYASU YUJI (JP)
SATO KENJI (JP)
MINAMOTO HIROSHI (JP)
AOKI KAZUNARI (JP)
NOBUYASU YUJI (JP)
Application Number:
PCT/JP2012/083536
Publication Date:
July 03, 2014
Filing Date:
December 25, 2012
Export Citation:
Assignee:
SHINETSU ENG CO LTD (JP)
IRIE KOKEN KK (JP)
IRIE KOKEN KK (JP)
International Classes:
F15B15/10; G02F1/13
Foreign References:
| JP2003273508A | 2003-09-26 | |||
| JP2008298232A | 2008-12-11 | |||
| JP2007032581A | 2007-02-08 | |||
| JPS6244123B2 | 1987-09-18 |
Attorney, Agent or Firm:
EICHI Patent & Trademark Corp. (JP)
Patent business corporation Wisdom international patent firm (JP)
Patent business corporation Wisdom international patent firm (JP)
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