Title:
ALIGNMENT DEVICE AND ALIGNMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/153877
Kind Code:
A1
Abstract:
An alignment device according to various embodiments of the present disclosure comprises: a body part including a body, which is moved by means of a first moving part and has a body hole, and a mask plate, which is moved by means of a second moving part and has a mask plate hole; and a head part, which is arranged on the body part and is moved by means of a third moving part, wherein the mask plate is arranged between the body and the head part, and is moved by means of the second moving part so as to move between the body and the head part.
Inventors:
HAN KYOSHIK (KR)
KWON YOUNGWOOK (KR)
SUK BONGHO (KR)
KIM KANGHO (KR)
KIM MYEONGGU (KR)
YU SEUNGJONG (KR)
YU CHANGWOO (KR)
CHO YOUNGMIN (KR)
KWON YOUNGWOOK (KR)
SUK BONGHO (KR)
KIM KANGHO (KR)
KIM MYEONGGU (KR)
YU SEUNGJONG (KR)
YU CHANGWOO (KR)
CHO YOUNGMIN (KR)
Application Number:
PCT/KR2023/002023
Publication Date:
August 17, 2023
Filing Date:
February 10, 2023
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD (KR)
International Classes:
H01L21/68; H01L21/677; H01L21/683; H01L21/687; H01L25/075
Foreign References:
| KR20180132510A | 2018-12-12 | |||
| KR101404979B1 | 2014-06-10 | |||
| KR20090107677A | 2009-10-14 | |||
| JPH05104380A | 1993-04-27 | |||
| JP2006177755A | 2006-07-06 |
Attorney, Agent or Firm:
LEE, Keon-Joo et al. (KR)
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