Title:
ALIGNMENT JIG, ALIGNMENT METHOD, AND TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2018/003602
Kind Code:
A1
Abstract:
An alignment jig (100) provided with a plurality of container portions (101) in which chip members (CP) can be contained is characterized in that the container portions (101) have a container corner portion (103) that is formed in such a way that, when the chip members (CP) are respectively contained in the plurality of container portions (101) and the chip members (CP) are abutted against a wall portion (102) of the container portions (101), a chip member corner portion of the chip member (CP) does not contact the container corner portion (103).
Inventors:
OKAMOTO NAOYA (JP)
YAMADA TADATOMO (JP)
MENJO TOSHIAKI (JP)
YAMADA TADATOMO (JP)
MENJO TOSHIAKI (JP)
Application Number:
PCT/JP2017/022686
Publication Date:
January 04, 2018
Filing Date:
June 20, 2017
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/68; H01L21/301
Foreign References:
| JP2011096961A | 2011-05-12 | |||
| JPH03177030A | 1991-08-01 | |||
| JPH0794535A | 1995-04-07 |
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
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