Title:
ANGULAR SPEED SENSOR DRIVE CIRCUIT AND ANGULAR SPEED SENSOR, AS WELL AS EXCITATION METHOD AND DRIVE IC CHIP FOR SAME
Document Type and Number:
WIPO Patent Application WO/2015/079678
Kind Code:
A1
Abstract:
The present invention pertains to a low-power-consumption, miniaturized angular speed sensor. First and second sensor units (21, 51) are a plurality of sensor units having first and second oscillation detection electrodes (22a, 52a) and first and second oscillation drive electrodes (22b, 52b). An excitation circuit (23) excites the first and second sensor units. First and second switching circuits (24, 54) are connected between the output terminal of the excitation circuit and the first and second oscillation drive electrodes of the first and second sensor units, and connect or disconnect an excitation loop formed between the first and second sensor units and the excitation circuit. A control circuit (25) controls the first and second switching circuits so as to disconnect the excitation loop if the amplitude of a drive signal, which is an output signal from the excitation circuit, is greater than a prescribed amplitude.
Inventors:
KOIZUMI YOSHIHIKO (JP)
Application Number:
PCT/JP2014/005892
Publication Date:
June 04, 2015
Filing Date:
November 25, 2014
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
G01C19/56; H01L29/84
Foreign References:
| JP2000081335A | 2000-03-21 | |||
| JP2007071654A | 2007-03-22 | |||
| JPH0540040A | 1993-02-19 | |||
| JPH06300568A | 1994-10-28 | |||
| JP2009058229A | 2009-03-19 | |||
| JP2012230052A | 2012-11-22 | |||
| JP2013137321A | 2013-07-11 |
Attorney, Agent or Firm:
MORI, Tetsuya et al. (JP)
Woods Tetsuya (JP)
Woods Tetsuya (JP)
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