Title:
APPARATUS AND METHOD FOR MANUFACTURING SILICON NITRIDE POWDER
Document Type and Number:
WIPO Patent Application WO/2015/099334
Kind Code:
A1
Abstract:
The present invention relates to an apparatus and a method for manufacturing a silicon nitride powder, and more specifically, disclosed are an apparatus and a method for manufacturing silicon nitride powder capable of silicon diimide synthesis and decomposition in the same reactor. The present invention provides the apparatus for manufacturing silicon nitride powder comprising: a reactor body forming a reaction space therein; a raw gas supply portion for supplying raw gases inside the reactor so that each raw gas has an upward flow in the reaction space; a byproduct capturing portion for capturing a byproduct discharged from the reactor body; and a heating means for heating silicon diimide, which is a product produced inside the reactor, to a temperature for pyrolysis.
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Inventors:
CHUNG YONG-KWON (KR)
KOO JAE-HONG (KR)
KIM SHIN-A (KR)
CHI EUN-OK (KR)
HAN JEE-HYUN (KR)
KOO JAE-HONG (KR)
KIM SHIN-A (KR)
CHI EUN-OK (KR)
HAN JEE-HYUN (KR)
Application Number:
PCT/KR2014/012227
Publication Date:
July 02, 2015
Filing Date:
December 11, 2014
Export Citation:
Assignee:
OCI CO LTD (KR)
International Classes:
C04B35/584; C04B35/64
Domestic Patent References:
| WO2012156191A1 | 2012-11-22 |
Foreign References:
| JP2010235339A | 2010-10-21 | |||
| JP2011213546A | 2011-10-27 | |||
| KR890003510B1 | 1989-09-23 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
특허법인 대아 (KR)
특허법인 대아 (KR)
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