Title:
APPARATUS FOR TRANSFERRING PLURALITY OF CHIPS AND METHOD OF TRANSFERRING PLURALITY OF CHIPS
Document Type and Number:
WIPO Patent Application WO/2021/091218
Kind Code:
A1
Abstract:
This apparatus for transferring a plurality of chips comprises: a tape supporter that supports a chip-attached tape in which a plurality of chips are attached to an adhesive layer; and a pickup tool that is disposed below the tape supporter so as to be movable with respect to the chip-attached tape, selectively irradiates, with ultraviolet laser light, a selected region, corresponding to at least one chip selected from among the chips, of a contact region to which the selected chips belong, converts the selected region into a cured region, is disposed on an ultraviolet light source and the tape supporter so as to face the chip-attached tape, and picks up chips corresponding to the cured patterns from the cured region of the chip-attached tape, and places the chips.
Inventors:
YANG JIN SOK (KR)
Application Number:
PCT/KR2020/015305
Publication Date:
May 14, 2021
Filing Date:
November 04, 2020
Export Citation:
Assignee:
YANG JIN SOK (KR)
International Classes:
H01L21/67; H01L21/52; H01L21/677; H01L21/683
Foreign References:
| KR20050062886A | 2005-06-28 | |||
| KR101322571B1 | 2013-10-28 | |||
| JP6202088B2 | 2017-09-27 | |||
| JP4934942B2 | 2012-05-23 | |||
| JP2015142120A | 2015-08-03 | |||
| KR20190113746A | 2019-10-08 |
Attorney, Agent or Firm:
LEE, Dong Gun (KR)
Download PDF: