Title:
APPEARANCE INSPECTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/066628
Kind Code:
A1
Abstract:
[PROBLEMS] An appearance inspecting device for detecting a defect such as a scratch
in the surface of an object to be inspected with an adequate resolution and judging
the formed state of a film on the surface of the object while suppressing an increase
of the throughput to an irreducible minimum. [MEANS FOR SOLVING PROBLEMS] An
appearance inspecting device comprises an imaging unit (20) having line sensors
(22R, 22G, 22B) having different color sensitivities and a processing unit (50).
The processing unit (50) has pixel data acquiring means (S14) for acquiring pixel
gray-scale data with a first pixel density from the gray-scale signal from a reference
line sensor and acquiring pixel gray-scale data with a second pixel density lower
than the first pixel density from the gray-scale signals from the line sensors
other than the reference line sensor. Information representing the state of
the surface of the object is created from the pixel gray-scale data acquired with
the first pixel density and that acquired with the second pixel density.
Inventors:
HAYASHI YOSHINORI (JP)
MORI HIDEKI (JP)
MORI HIDEKI (JP)
Application Number:
PCT/JP2006/324198
Publication Date:
June 14, 2007
Filing Date:
December 05, 2006
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP (JP)
HAYASHI YOSHINORI (JP)
MORI HIDEKI (JP)
HAYASHI YOSHINORI (JP)
MORI HIDEKI (JP)
International Classes:
G01N21/956; H01L21/66; H04N5/335
Foreign References:
| JPH02214265A | 1990-08-27 | |||
| JPH0556218A | 1993-03-05 | |||
| JPH0522615A | 1993-01-29 | |||
| JP2004139523A | 2004-05-13 | |||
| JPH11127321A | 1999-05-11 | |||
| JP2000114329A | 2000-04-21 |
Other References:
See also references of EP 1959251A4
Attorney, Agent or Firm:
HIGUCHI, Masaki (1-4-3 Sengencho, Nishi-k, Yokohama-shi Kanagawa 72, JP)
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