Title:
ARC EVAPORATION SOURCE AND VACUUM EVAPORATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2007/148396
Kind Code:
A1
Abstract:
An arc evaporation source and a vacuum evaporation system in which evaporation
substances emitted from the cathode of vacuum arc discharge can be collected
appropriately. The arc evaporation source (100) comprises first and second
electrodes (14A, 14B) opposing each other through a gap (G), wherein at least
any one of the first and second electrodes (14A, 14B) serves as a cathode and the
other electrode of the first and second electrodes (14A, 14B) can collect evaporation
substances emitted from the cathode based on vacuum arc discharge generated
between the cathode and the anode.
Inventors:
KOIZUMI YASUHIRO
NOSE KOUICHI
NOSE KOUICHI
Application Number:
PCT/JP2006/312489
Publication Date:
December 27, 2007
Filing Date:
June 22, 2006
Export Citation:
Assignee:
SHINMAYWA IND LTD (JP)
KOIZUMI YASUHIRO
NOSE KOUICHI
KOIZUMI YASUHIRO
NOSE KOUICHI
International Classes:
C23C14/24
Foreign References:
| JPH02170968A | 1990-07-02 | |||
| JP2002069664A | 2002-03-08 | |||
| JP2002069664A | 2002-03-08 |
Attorney, Agent or Firm:
SUMIDA, Yoshihiro et al. (3rd Fl. Bo-eki Bldg., 123-1,Higashimachi, Chuo-ku, Kobe-sh, Hyogo 31, JP)
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