Title:
ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2012/050006
Kind Code:
A1
Abstract:
The present invention provides an array substrate and a method for manufacturing an array substrate, with which it is possible to simplify the steps involved in manufacturing an array substrate having a highly heat-resistant optical screening film. The present invention provides a method for manufacturing an array substrate comprising a step (1) for forming an optical screening film, and a step (2) for forming a semiconductor element over the optical screening film, wherein step (1) includes: a step for forming, on a substrate, a photoresist film including an optical screening material and a resin material; a step for exposing the photoresist film; a step for forming a photoresist pattern by developing the exposed photoresist film; and a step for removing the resin material from the photoresist pattern by heat processing.
Inventors:
YAMADA MAKOTO
Application Number:
PCT/JP2011/072836
Publication Date:
April 19, 2012
Filing Date:
October 04, 2011
Export Citation:
Assignee:
SHARP KK (JP)
YAMADA MAKOTO
YAMADA MAKOTO
International Classes:
G02F1/1368; H01L29/786
Foreign References:
| JPH05249492A | 1993-09-28 | |||
| JPS63237033A | 1988-10-03 | |||
| JP2001283880A | 2001-10-12 |
Attorney, Agent or Firm:
YASUTOMI & Associates (JP)
Patent business corporation Yasutomi international patent firm (JP)
Patent business corporation Yasutomi international patent firm (JP)
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