Title:
FERROELECTRIC THIN FILM HAVING SUPERLATTICE STRUCTURE, MANUFACTURING METHOD THEREOF, FERROELECTRIC ELEMENT, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2012/050007
Kind Code:
A1
Abstract:
At least two types of oxide nanosheets or other conductors having mutually different layered perovskite structures are layered together, and the nanosheets are joined together using an ionic substance to form a ferroelectric thin film having a superlattice structure. This layered structure makes it possible to form a film that exhibits ferroelectric characteristics overall, without the use of a ferroelectric. Provided thereby is a ferroelectric film that is based on a novel principle, can be used in ferroelectric memory or the like, and does not develop the size effect even when extremely thin.
Inventors:
OSADA MINORU (JP)
SASAKI TAKAYOSHI (JP)
SASAKI TAKAYOSHI (JP)
Application Number:
PCT/JP2011/072844
Publication Date:
April 19, 2012
Filing Date:
October 04, 2011
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE (JP)
OSADA MINORU (JP)
SASAKI TAKAYOSHI (JP)
OSADA MINORU (JP)
SASAKI TAKAYOSHI (JP)
International Classes:
H01L21/316; C01G33/00; G11C11/22; H01L21/314; H01L21/8246; H01L27/105
Domestic Patent References:
| WO2008078652A1 | 2008-07-03 |
Foreign References:
| JP2004023042A | 2004-01-22 | |||
| JPH08167326A | 1996-06-25 |
Attorney, Agent or Firm:
NISHIZAWA TOSHIO (JP)
Toshio Nishizawa (JP)
Toshio Nishizawa (JP)
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