Title:
ARRAY SUBSTRATE AND PREPARATION METHOD THEREFOR, AND DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2023/044957
Kind Code:
A1
Abstract:
The present application discloses an array substrate and a preparation method therefor, and a display panel. The preparation method for an array substrate comprises: providing a substrate; sequentially stacking an active layer, a gate insulating layer, and a gate on the substrate, and using a photomask to perform graphical processing on the active layer, the gate insulating layer, and the gate to form an active portion, a gate insulating portion, and a gate portion that are stacked; and providing an interlayer dielectric layer on each of the substrate, the active portion, the gate insulating portion, and the gate portion.
Inventors:
DAI XINGQIANG (CN)
Application Number:
PCT/CN2021/122260
Publication Date:
March 30, 2023
Filing Date:
September 30, 2021
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L27/12; G02F1/1362; G02F1/1368; H01L21/77
Foreign References:
| CN105655359A | 2016-06-08 | |||
| CN104022077A | 2014-09-03 | |||
| CN105097845A | 2015-11-25 | |||
| CN104022076A | 2014-09-03 | |||
| US20140084264A1 | 2014-03-27 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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