Title:
ARRAY SUBSTRATE, RADIATION DETECTOR, AND WIRING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2015/029938
Kind Code:
A1
Abstract:
An array substrate according to an embodiment comprises: a substrate; a plurality of first wiring lines that are provided on a surface of the substrate and that extend in a first direction; a plurality of second wiring lines that are provided on the surface of the substrate and that extend in a second direction intersecting the first direction; thin-film transistors provided in respective regions defined by the plurality of first wiring lines and the plurality of second wiring lines; a protection layer that covers at least the plurality of first wiring lines and the plurality of second wiring lines; and a plurality of connection parts that are provided on the protection layer and/or between the plurality of first wiring lines and the substrate and/or between the plurality of second wiring lines and the substrate, the connection parts being electrically connected to the respective first wiring lines and the respective second wiring lines and including an electroconductive material that has a higher corrosion resistance than the material(s) of the first wiring lines and the second wiring lines. An end surface of each first wiring line and second wiring line on the peripheral edge side of the substrate is covered by the protection layer, and an end surface of each connection part on the peripheral edge side of the substrate is provided at the position of the peripheral edge of the substrate in a planar view.
Inventors:
TAKIKAWA TATSUYA (JP)
SHIMBA YUICHI (JP)
SHIMBA YUICHI (JP)
Application Number:
PCT/JP2014/072135
Publication Date:
March 05, 2015
Filing Date:
August 25, 2014
Export Citation:
Assignee:
TOSHIBA KK (JP)
TOSHIBA ELECTRON TUBES & DEVIC (JP)
TOSHIBA ELECTRON TUBES & DEVIC (JP)
International Classes:
H01L27/146; G01T1/20; G01T7/00; H01L21/3205; H01L21/768; H01L21/822; H01L23/522; H01L27/04; H01L27/144; H01L29/786; H01L31/10; H04N5/32
Foreign References:
| JP2009251174A | 2009-10-29 | |||
| JP2010152091A | 2010-07-08 | |||
| JP2011112688A | 2011-06-09 | |||
| JP2009130273A | 2009-06-11 | |||
| JP2010210713A | 2010-09-24 | |||
| JP2012156204A | 2012-08-16 | |||
| JP2009170768A | 2009-07-30 | |||
| JPH0527263A | 1993-02-05 |
Other References:
See also references of EP 3041049A4
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (JP)
Masahiko Hiugaji (JP)
Masahiko Hiugaji (JP)
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