Title:
ATOMIC BEAM SHUTTER EMPLOYING PIEZOELECTRIC BENDING ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2018/092946
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an atomic beam shutter which is configured to be opened and closed using a piezoelectric bending actuator, thereby being unaffected by a magnetic field, having good compatibility in an ultra-high vacuum (UHV), generating little mechanical vibration, having a long life, and showing a quick response.
Inventors:
PARK CHANG YONG (KR)
YU DAI HYUK (KR)
LEE WON KYU (KR)
HEO MYOUNG SUN (KR)
KIM HUIDONG (KR)
YU DAI HYUK (KR)
LEE WON KYU (KR)
HEO MYOUNG SUN (KR)
KIM HUIDONG (KR)
Application Number:
PCT/KR2016/013321
Publication Date:
May 24, 2018
Filing Date:
November 18, 2016
Export Citation:
Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
H05H3/02; G01J3/42; H01S3/121
Foreign References:
| JPH05225938A | 1993-09-03 | |||
| JP2008311136A | 2008-12-25 | |||
| JPH0734230A | 1995-02-03 | |||
| JP2007207645A | 2007-08-16 | |||
| US4850697A | 1989-07-25 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
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