ATOMIC FLUX MEASUREMENT DEVICE

Title:

ATOMIC FLUX MEASUREMENT DEVICE

Document Type and Number:

WIPO Patent Application WO/2012/005228

Kind Code:

A1

Abstract:

Disclosed is a low-cost compact atomic flux measurement device for measuring flux of dissociated atoms generated by discharge, said flux being emitted from a plasma generation cell into a container. The disclosed atomic flux measurement device is configured with opposing electrodes configured by the pair of a first and a second sheet electrode separated by a prescribed interval and arranged roughly in parallel, a DC power source having two aims, one aim being to maintain the first sheet electrode at a negative potential and cause atoms attached to the inner surface of said sheet electrode to self-ionize, the other aim being to apply a DC voltage in order to create a current between the first and second sheet electrodes, and a DC ammeter which measures the current of the electrons emitted from the dissociated atoms due to self-ionization which are attached to the inner surface of the first sheet electrode.

Inventors:

OHACHI TADASHI (JP)
WADA MOTOI (JP)
ARIYADA OSAMU (JP)
YAMABE NOBUHIKO (JP)

Application Number:

PCT/JP2011/065316

Publication Date:

January 12, 2012

Filing Date:

July 05, 2011

Export Citation:

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Assignee:

DOSHISHA (JP)
ARIOS INC (JP)
OHACHI TADASHI (JP)
WADA MOTOI (JP)
ARIYADA OSAMU (JP)
YAMABE NOBUHIKO (JP)

International Classes:

H05H1/00; C23C14/06; C23C14/28; H01L21/203

Foreign References:

JP2009146755A	2009-07-02
JP2010232496A	2010-10-14
JP2009146755A	2009-07-02
JP2008078200A	2008-04-03

Other References: