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Patent Searching and Data


Title:
BEAM RECORDING DEVICE, AND BEAM ADJUSTING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/111260
Kind Code:
A1
Abstract:
Provided is a beam recording device comprising a displacement detector having at least three displacement sensors arranged at different angles in the radial directions of a turntable, a shape calculator for calculating shape data corresponding to the displacement of the side face of the turntable in the radial directions, on the basis of the detected displacements of the aforementioned at least three displacement sensors, a rotational deflection computing unit for computing the rotational deflection, as containing a rotational asynchronous component and a rotational synchronous component, of the turntable, on the basis of the detected displacement from at least one of the displacement sensors and the shape data, and a beam irradiation position adjustor for adjusting the irradiation position of an electron beam on the basis of the rotational deflection.

Inventors:
KITAHARA HIROAKI (JP)
WADA YASUMITSU (JP)
Application Number:
PCT/JP2007/056057
Publication Date:
October 04, 2007
Filing Date:
March 23, 2007
Export Citation:
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Assignee:
PIONEER CORP (JP)
KITAHARA HIROAKI (JP)
WADA YASUMITSU (JP)
International Classes:
G11B9/10
Foreign References:
JP2003317285A2003-11-07
JP2003036548A2003-02-07
Other References:
YAMADA R.: "Shin'endo Sokutei ni Okeru 2 Tenho Oyobi 3 Tenho no Yuyosei", JOURNAL OF JAPAN SOCIETY FOR DESIGN ENGINEERING, vol. 36, no. 4, April 2001 (2001-04-01), pages 137 - 142
Attorney, Agent or Firm:
FUJIMURA, Motohiko (Togeki-Bldg. 1-1, Tsukiji 4-chome, Chuo-k, Tokyo 45, JP)
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