ELECTRON-BEAM RECORDING DEVICE, AND BEAM ADJUSTING METHOD

WIPO Patent Application WO/2007/111261

A1

Provided is an electron-beam recording device comprising a scale having graduations formed to indicate the rotational angular position of a turntable, at least three read heads arranged at predetermined relative angles on a circumference on the center of rotation of the turntable, for individually reading the graduations to generate read signals, a phase difference detector using one of the read signals as a reference read signal, for detecting phase differences between the read signals of the aforementioned at least three read heads other than the reference read signal, and the reference read signal, a scale error computing unit for computing a scale error or an angular position error of the graduations on the basis of that phase difference, a rotational speed fluctuation computing unit for computing the rotational speed fluctuations of the turntable on the basis of the scale error and the read signals, and a beam irradiation position adjustor for adjusting the irradiation position of an electron beam on the basis of the rotational speed fluctuations.

KITAHARA HIROAKI (JP)
WADA YASUMITSU (JP)

PCT/JP2007/056058

October 04, 2007

March 23, 2007

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PIONEER CORP (JP)
KITAHARA HIROAKI (JP)
WADA YASUMITSU (JP)

G03F7/20; G11B5/84; G11B7/26

JP2002050048A	2002-02-15
JP2003262518A	2003-09-19
JPH06313719A	1994-11-08
JP2005168280A	2005-06-23
JP2001356026A	2001-12-26

FUJIMURA, Motohiko (Togeki-Bldg. 1-1, Tsukiji 4-chome, Chuo-k, Tokyo 45, JP)

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