Title:
BOARD PROCESSING APPARATUS AND BOARD PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/047679
Kind Code:
A1
Abstract:
When a board and a board holder are soaked into a processing liquid, the reduction of temperature of the processing liquid can be suppressed without degrading the throughput of board processing. A board processing apparatus of the invention comprises: a holder cabinet 41 for keeping a board holder 80; and a heating device 44 that is disposed in the holder cabinet 41 and that is configured to heat the board holder 80 kept in the holder cabinet 41.
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Inventors:
KOBAYASHI KENICHI (JP)
YOKOYAMA TOSHIO (JP)
YOKOYAMA TOSHIO (JP)
Application Number:
PCT/JP2015/076906
Publication Date:
March 31, 2016
Filing Date:
September 24, 2015
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
H01L21/677; H01L21/027; H01L21/306
Foreign References:
| JPH0729880A | 1995-01-31 | |||
| JP2012019116A | 2012-01-26 | |||
| JP2002222806A | 2002-08-09 | |||
| JPH0791645B2 | 1995-10-04 | |||
| JPH01261296A | 1989-10-18 |
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
Ono Shinjiro (JP)
Ono Shinjiro (JP)
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