Title:
BROADBAND MEMS MICROPHONE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2011/093584
Kind Code:
A2
Abstract:
The present invention relates to a MEMS microphone which is capable of enhancing acoustic performance. According to the present invention, provided is a MEMS microphone comprising: a microphone chip and an ASIC chip which are mounted on a silicon substrate; a metal case which is installed so as to surround the microphone chip and ASIC chip, and thus to form an acoustic cavity which is formed with an acoustic hole so as to allow the inflow of sound; and a volume reduction member which is disposed within the metal case and reduces the volume of the acoustic cavity.
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Inventors:
PARK DU-YOUNG (KR)
KIM CHANG-WON (KR)
KIM JUNG-MIN (KR)
KIM CHANG-WON (KR)
KIM JUNG-MIN (KR)
Application Number:
PCT/KR2010/008294
Publication Date:
August 04, 2011
Filing Date:
November 23, 2010
Export Citation:
Assignee:
BSE CO LTD (KR)
PARK DU-YOUNG (KR)
KIM CHANG-WON (KR)
KIM JUNG-MIN (KR)
PARK DU-YOUNG (KR)
KIM CHANG-WON (KR)
KIM JUNG-MIN (KR)
International Classes:
H04R19/04
Foreign References:
KR20080071340A | 2008-08-04 | |||
KR20080005801A | 2008-01-15 | |||
KR100737726B1 | 2007-07-04 | |||
KR20060127166A | 2006-12-11 |
Attorney, Agent or Firm:
YOON, Byung-Sam et al. (KR)
윤병삼 (KR)
윤병삼 (KR)
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Claims:
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