Title:
BULK ACOUSTIC RESONATOR HAVING INSERTION LAYER TO INCREASE POWER, AND FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/001861
Kind Code:
A1
Abstract:
The present disclosure relates to a bulk acoustic resonator. The bulk acoustic resonator comprises a substrate, an acoustic mirror, a bottom electrode, a top electrode, and a piezoelectric layer, wherein the resonator further comprises a first insertion layer at a connecting edge of the top electrode, the first insertion layer is arranged, in the thickness direction of the resonator, between the top electrode and the substrate, and an edge of the acoustic mirror is located, in the transverse direction of the resonator, between an inner end and an outer end of the first insertion layer; and the resonator further comprises a first non-conductive dielectric layer at the connecting edge of the top electrode, the first non-conductive dielectric layer is arranged, in the thickness direction of the resonator, between the first insertion layer and the top electrode, an inner end of the first non-conductive dielectric layer is located, in the transverse direction, on an inner side of the inner end of the first insertion layer, and an outer end of the first non-conductive dielectric layer is flush, in the transverse direction, with the outer end of the first insertion layer or is located on an outer side of the outer end of the first insertion layer. The present disclosure further relates to a filter and an electronic device.
Inventors:
PANG WEI (CN)
HAO LONG (CN)
XU YANG (CN)
ZHANG QUANDE (CN)
MA XIAODAN (CN)
YANG QINGRUI (CN)
HAO LONG (CN)
XU YANG (CN)
ZHANG QUANDE (CN)
MA XIAODAN (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2021/102315
Publication Date:
January 06, 2022
Filing Date:
June 25, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02; H03H9/17; H03H9/56
Foreign References:
| CN111934640A | 2020-11-13 | |||
| CN111245400A | 2020-06-05 | |||
| CN111313857A | 2020-06-19 | |||
| CN111010104A | 2020-04-14 | |||
| CN111193484A | 2020-05-22 | |||
| US20190058451A1 | 2019-02-21 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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